SMEE

Chinese chip making shows progress with new EUV patent from domestic lithography champion

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Chinese chip making shows progress with new EUV patent from domestic lithography champion

A newly revealed patent from Chinese lithography systems maker Shanghai Micro Electronics Equipment (SMEE) shows how domestic firms could progress in the local advanced lithography tools market despite US sanctions. The “extreme ultraviolet [EUV] radiation generators and lithography equipment” patent, filed in March 2023, was published publicly on Tuesday and is still being vetted by … Read more

Exclusive | Tech war: China quietly making progress on new techniques to cut reliance on advanced ASML lithography machines

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Exclusive | Tech war: China quietly making progress on new techniques to cut reliance on advanced ASML lithography machines

Beijing-based Naura Technology Group started research on lithography systems last month, according to people familiar with the matter, as China’s home-grown semiconductor tool makers try workarounds to produce advanced chips without the latest equipment from Dutch giant ASML, a breakthrough that could potentially thwart US attempts to contain China’s chip-making capabilities. The efforts, which involve … Read more